Abstract:Different scales of the inverted pyramid structure are obtained by the acidic nano structure rebuilding (NSR) process, which realizes the mass prodution of high efficiency nanostructured multicrystallineblack silicon (mcbSi) solar cells with low cost. Firstly, the multi wire slurry sawn (MWSS) of multi crystalline silicon(mcSi) is investigated through silver metal assisted chemical etching(MACE). Results show that the dihedral angels of inverted pyramid maintain at 54.7°. The inverted pyramid structured mcbSi solar cell shows the best efficiency of 18.62% , with 500 nm inverted pyramid structure by 400 s NSR treatment at 50 °C, and the surface reflectance is 3.29%. Furthermore,the paper studies the texture property obtained by Ag/Cu MACE method and NSR treatment on diamond wire sawn (DWS) mcSi. The research results show that the saw marks on DWS mcSi surface are nearly disappeared. We obtain the optimal DWS mcSi solar cell with the same size of 600 nm invert pyramid sample, with Voc, Jsc and FF at 640 mV, 37.35 A/cm2 and 79.91%, respectively, and the maximum conversion efficiency is 19.10% which is higher than that of MWSS mcbSi solar cell.