Micro electroforming by using a movable patter ned anode is a novel process to fabricate metal microstructure， which is simple， cost effective and able to fabricate high aspect ratio microstructure. The ac cu racy and resolution of the proposed micro electroforming process are significant l y affected by the localization of electrodeposition. The localiza tion of electrodepositon is studied theoretically and experimentally. The resul ts indicat that the width of stray deposition is proportionally linear to th e gap between the anode and the cathode; however， it has nothing to do with the current density， the thickness of the anode insulation layer and the width of th e feature.