CFRP/Ti stacks have been widely used in aviation industry. Mechanical characteristics of Carbon fiber reinforced plastic (CFRP) is greatly different from that of the titanium alloy. The low thermal coefficient and elastic modulus of Titanium alloy lead to long spiral chips with high temperature during drilling which may cause surface scratches of machined hole and damages to the CFRP layer. In the paper three types of drilling methods:conventional drilling, rotary ultrasonic assisted drilling and low-frequency vibration assisted drilling are compared and analyzed from the following points of view:Cutting temperate, drilling quality and chip morphology. It is shown that compared with conventional drilling, both the ultrasonic vibration and low frequency vibration assisted drilling could reduce the temperature and improve the drilling quality. The low frequency vibration assisted drilling method could break the cutting chips belts of titanium alloy material to small chips. Due to the reason, the cutting temperature could be reduced by 45%. As a result, the CFRP damages caused by over heated cutting chips belts of titanium alloy could be avoided, and the drilling quality could be improved to a great deal.